Three-dimensional programmable resistance memory device with a read/write circuit stacked under a memory cell array

ABSTRACT

A programmable resistance memory device includes a semiconductor substrate, at least one cell array, in which memory cells are arranged and formed above the semiconductor substrate. Each of the memory cells has a stack structure of a programmable resistance element and an access element, the programmable resistance element storing a high resistance state or a low resistance state based on the polarity of voltage application in a non-volatile manner. The access element has a resistance value in an off-state in a certain voltage range that is ten time or more as high as that in a select state. A read/write circuit is formed on the semiconductor substrate and underlying the cell array for data reading and data writing in communication with the cell array.

TECHNICAL FIELD

This invention relates to a programmable resistance memory device forstoring a resistance state as data in a non-volatile manner, with aprogrammable resistance element which is switchable between a lowresistance state and a high resistance state by reversing the polarityof voltage application.

BACKGROUND ART

Recently, there have been proposed some memory devices havingprogrammable resistance elements. One of these memory devices is knownas a phase change memory which uses phase transition between anamorphous state and a crystalline state of a memory material (forexample, U.S. Pat. No. 6,314,014B1). In such a phase change memorydevice, by controlling the current of a chalcogenide cell, reversibleswitching may be performed between a crystalline state (i.e. lowresistance state) and an amorphous state (i.e. high resistance state).By applying a large current to a cell so as to cause the cellchalcogenide to be melted, then rapidly cooled down it, a low resistancestate may be written. Annealing the chalcogenide to such a degree as tocrystallize it without melting, and a high resistance state may bewritten. Therefore, it is possible to obtain an electrically rewritablenon-volatile memory device.

Other programmable resistance memories have been proposed as includingprogrammable resistances switchable between a low resistance state and ahigh resistance state by reversing the polarity of voltage application.One of these has an ion conductor formed of a chalcogenide containingmetals (for example, U.S. Pat. No. 6,418,049B1), and another one has apolymer in which conductive particles are dispersed (for example, U.S.Pat. No. 6,072,716). In these memories, dendrite growth and retractionthereof in a solid by voltage application are used. In order to write alow resistance state into a cell, a voltage is applied between the anodeand cathode of a cell in such a polarity that the anode is positive. Asa result, a dendrite grows from the cathode to reach the anode, wherebythe cell comes to be in a low resistance state. A reverse voltageapplication retracts the dendrite to cause the cell to be in a highresistance state. Such a resistance change is reversible, and the lowresistance state and the high resistance state may be stored in anon-volatile manner.

It has been suggested that it is possible to achieve an electricallyrewritable non-volatile memory with a high density by use of such aprogrammable resistance. However, there has not been proposed a detailedconfiguration of a cell array and a read/write circuit thereof. In orderto achieve a practical non-volatile memory with a high density and ahigh performance, how to combine the programmable resistance with whatkinds of switching devices for constituting a cell array, how toconstruct the read/write circuit in communication with the cell array,and the like become important technical issues.

DISCLOSURE OF INVENTION

A programmable resistance memory device according to one aspect of thepresent invention includes:

a semiconductor substrate;

at least one cell array, in which memory cells are arranged, formedabove the semiconductor substrate, each the memory cell having a stackstructure of a programmable resistance element and an access element,the programmable resistance element storing a high resistance state or alow resistance state determined due to the polarity of voltageapplication in a non-volatile manner, the access element having such aresistance value in an off-state in a certain voltage range that is tentimes or more as high as that in a select state; and

a read/write circuit formed on the semiconductor substrate as underlyingthe cell array for data reading and data writing in communication withthe cell array.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram for explaining the principle of data write for aprogrammable resistance memory element according to an embodiment of thepresent invention.

FIG. 2 shows a basic cell array and a voltage application mode thereoffor a selected cell according to the embodiment.

FIG. 3 shows another voltage application mode for the selected cell inthe basic cell array.

FIG. 4 shows a read/write voltage relationship for a unit cell.

FIG. 5 shows a cell characteristic for explaining a write principle.

FIG. 6 shows a cell characteristic for explaining a read principle.

FIG. 7 shows a layout of a three-dimensional cell array according to theembodiment.

FIG. 8 is a sectional diagram as taken along line I-I′ of thethree-dimensional cell array shown in FIG. 7.

FIG. 9 is a sectional diagram of another three-dimensional cell array.

FIG. 10 shows an equivalent circuit of the three-dimensional cell array.

FIG. 11 shows a resistance distribution of memory cells.

FIG. 12 shows a resistance distribution of the three-dimensional cellarray according to the embodiment.

FIG. 13 shows a pair cell configuration method according to theembodiment.

FIG. 14 is a diagram showing operational wave forms for explanation ofdata read according to the embodiment.

FIG. 15 is a diagram showing operation wave forms for explanation ofdata write according to the embodiment.

FIG. 16 is a diagram showing operation wave forms for explanation ofdata write for a two pair cell in adjacent two cell arrays.

FIG. 17 shows another pair cell configuration method.

FIG. 18 is a perspective view showing a stack structure of thethree-dimensional cell array and a read/write circuit thereof accordingto the embodiment.

FIG. 19 is a cross-sectional diagram showing the interconnectionrelationship between bit lines of the cell array and the read/writecircuit.

FIG. 20 is a cross-sectional diagram showing the relationship betweenword lines and the read/write circuit.

FIG. 21 is a diagram showing a layout of the read/write circuit.

FIG. 22 is a diagram showing the word line select circuit portion of theread/write circuit.

FIG. 23 is a diagram showing the bit line select circuit portion of theread/write circuit.

FIG. 24 shows a main portion layout of the transistor circuit shown inFIGS. 22 and 23.

FIG. 25 is a perspective view of the cell array state after the bit lineformation.

FIG. 26 is a perspective view of the cell array state after the memorycell formation on the bit lines.

FIG. 27 is a perspective view of the cell array state after the wordline formation.

FIGS. 28A to 28C are cross-sectional views showing the word line formingprocess.

EMBODIMENTS

FIG. 1 shows a principle configuration of a programmable resistance(variable resistance) VR used in the present invention. The programmableresistance VR is formed of a resistance film 3 serving as a memorymaterial, and cathode and anode electrodes 1 and 2 sandwiching theresistance film 3. The resistance film 3 is, for example, an ionconductor (solid electrolyte) formed of a chalcogenide containing metalions such as silver, copper and the like. For example, Ge—S, Ge—Se andthe like may be used as the chalcogenide. In the case that theresistance film 3 is formed of the above-described chalcogenide, theelectrodes 1, 2 are formed containing silver.

The resistance film 3 stores, for example, a high resistance state as adata “0” and a low resistance state as a data “1”. In this programmableresistance VR, by applying a positive anode-cathode voltage (V_(AK)>0)that is over a threshold value, and a data “1” will be written. Byapplying a negative anode-cathode voltage (V_(AK)<0) that is over athreshold value, and a data “0” will be written. When “1” data iswritten, as a result of the voltage application of V_(AK)>0, aconductive dendrite 4 grows from the cathode electrode 1 toward theanode electrode 2 in the resistance film 3 as shown in FIG. 1. When thedendrite 4 reaches the anode electrode 2, the low resistance state (data“1”) is obtained. By applying a reverse voltage, and the dendrite 4 isretracted or broken, whereby the high resistance state (data “0”) isobtained. Such a low resistance state and a high resistance state may bestatically held as long as a voltage is not applied over the threshold.

It should be appreciated that the resistance film 3 may be formed of apolymer in which conductive particles are dispersed (for example, carbonpolymer in which carbon black particles are dispersed). In this case, alow resistance state and a high resistance state are reversibly writtenbased on the same principle as above.

The principle of the above-described memory operation is based on amechanism as described below. An ion conductor or a polymer isamorphous, and potential barriers are formed at random and staticallytherein. In addition, in the potential barrier distribution, potentialvalleys are formed continuously from the cathode to the anode. Bydispersing some of metals in such a solid material, and it is possibleto move metal ions along the potential valleys due to electric fieldapplication. When a voltage is applied in such a polarity that the anodeside is positive, metal ions move toward the cathode, and metal dendritegrows from the cathode electrode. Reverse the polarity of the electricfield, and the metals in the dendrite are charged and separated from thedendrite, and move toward the cathode along the potential valleys. As aresult, the dendrite may be retracted.

Data read of such a programmable resistance VR may be performed bycurrent monitoring when a voltage is applied to the programmableresistance VR at a level such that dendrite growth and retractionthereof do not occur. Alternatively, it is possible to use a large readvoltage without data disturbance in a condition that it has a polarityso as to accelerate the data “0”, “1” state.

FIG. 2 shows a basic cell array of a programmable resistance memory inaccordance with an embodiment, with respect to a 3×3 cell matrix. Aplurality of first wirings (hereinafter, bit lines BL) are provided inparallel, and a plurality of second wirings (hereinafter, word lines WL)are provided to cross the bit lines BL. Memory cells MC are laid out atthe respective crossing points of these word lines WL and bit lines BL.The memory cell MC is a series-connection circuit of a programmableresistance VR and a Zener diode ZD. The anode of Zener diode ZD isconnected to word lines WL.

In a non-select state, the bit lines BL are held at a high level voltageV_(H), and the word lines WL are held at a low level voltage V_(L). Inthis state, Zener diodes ZD are in a reverse-biased state and thus arein an off-state. FIG. 2 shows a case such that cell selection isperformed by use of a forward-bias characteristic of the Zener diode ZD.In detail, in order to select a cell MC which is surrounded by brokenlines, a selected word line WL is held at the high level voltage V_(H),and a selected bit line BL is held at the low level voltage V_(L);whereby, at the selected cell, its diode ZD becomes forward-biased to bein an on-state, and a voltage is applied to one programmable resistanceVR.

FIG. 3 shows a case such that a reverse bias is applied to theprogrammable resistance VR in the same cell array as shown in FIG. 2. Inthis case, breakdown of the Zener diode ZD is used. Zener breakdown isgenerated by band to band tunneling of the diode junction, and breakdownstart voltage (Zener voltage) Vz may be controlled by the impurityconcentration of the diode. Similarly to FIG. 2, in a non-select state,the bit lines BL are held at a high level voltage V_(H), and the wordlines WL are held at a low level voltage V_(L). In order to select acell MC which is surrounded by broken lines, a selected word line WL isheld at a low level voltage V_(LL) lower than V_(L), and a selected bitline BL is held at a high low level voltage V_(HH) higher than V_(H)(for example, V_(LL)=V_(L)−Δ, V_(HH)=V_(H)+Δ, where Δ is a voltage levelvariation); whereby, at the selected cell, a large backward bias isapplied to the diode ZD, thereby causing it breakdown. As a result, avoltage with a polarity opposite to that in FIG. 2 may be applied to oneprogrammable resistance VR.

The above-described level relationship is an example. For example, inFIG. 2, although the non-selected bit lines and selected word line areset at the same high level voltage V_(H), and non-selected word linesand selected bit line are set at the same low level voltage V_(L), it isnot necessary to use the same levels in these cases. With respect to thevoltage variation A used in the select mode in FIG. 3, it is notnecessary to use the same value for the bit line and word line.

In this embodiment, the cell selection method in which the forward biascharacteristic of the diode is used as shown in FIG. 2, is used for “0”data write and data read; and the cell selection method in which thebackward breakdown of the diode is used as shown in FIG. 3, is used for“1” data write. Giving attention to one memory cell, read and writecharacteristics will be described in detail, referring to FIGS. 4 and 5.

FIG. 4 shows a relationship between a read voltage Vr, a write voltageVw and a voltage of Zener diode ZD. Programmable resistance VR isconnected with such a polarity that anode (A) thereof is connected tothe bit line BL. The read voltage Vr and write voltage Vw are ones thatare applied between word line WL and bit line BL.

FIG. 5 shows characteristic changes of the programmable resistance VR inaccordance with write operations by use of a voltage (V)-current (I)characteristic of the diode ZD and a V-I characteristic (i.e., loadline) of the programmable resistance VR. In the first quadrant, aforward-bias characteristic curve 50 of the diode ZD is shown. This isexpressed as follows; I=I0{exp(qV/kT)−1}. In the third quadrant, shownare backward-bias characteristic curves 51 a, 51 b of the diode ZD. Inthe non-select state, the voltage applied to the cell is V_(L)-V_(H),thus the diode ZD is held at a high-impedance off-state on the curve 51a.

In the first quadrant of FIG. 5, “0” write operation is performed asfollows. Apply a write voltage Vw(0)=V_(H)−V_(L) in such a conditionthat Zener diode ZD becomes in an on-state, and the cell held in a “1”data state (i.e., low resistive state) 53 is written into a “0” datastate (i.e., high resistive state) 54. In principle, it is possible touse the first quadrant characteristic for “0” writing or for “1”writing. However, since it is required to use this quadrant for celldata reading as described later, “0” write operation is performed in thefirst quadrant. This can be said, in other words, that the programmableresistance VR is connected with such a polarity that anode (A) thereofis connected to the bit line BL in the cell array configuration shown inFIGS. 2 to 4. Corresponding with the write voltage application, a loadline 53 of “1” data state changes to a load line 54 of “0” data state,as shown by an arrow, as a result of that the dendrite of theprogrammable resistance is retracted, and resistance value thereofbecomes high.

In order to cause the programmable resistance of “1” data to take place,it is required that a voltage higher than a certain level is applied tothe programmable resistance. Such a level is shown as a “0” writethreshold value VT in FIG. 5. VT is expressed in a direction withreference to Vw(0) as a voltage applied to the programmable resistanceVR. If the cross point B1 between the forward bias characteristic curve50 of the Zener diode ZD and the load line 53 of “1” data state of theprogrammable resistance is positioned between the origin and Vw(0)−VT,“0” write may be entered into the programmable resistance. As describedabove, by using the first quadrant for “0” write, and it becomesdifficult for a write error to occur in the programmable resistance in aread mode. The reason of this will be described in detail later.

In the third quadrant, “1” write is performed. In this case, by applyinga large backward bias, it may cause the Zener diode to breakdown. Itallows current with an approximately constant voltage. In the drawing,“1” write operation is shown as follows; when write voltageVw(1)=V_(LL)−V_(HH) is applied as being over the breakdown voltage(Zener voltage) Vz, the programmable resistance VR changes from a highresistive state 56 of “0” data to a low resistive state 55 of “1” data.Load lines 56, 55, which express “0”, “1” states respectively, haveinclinations in correspondence with resistance values. Therefore, theseare in parallel with the load lines 53, 54 in the first quadrant,respectively. In this case, it is also required for successfully writingto the programmable resistance that a voltage higher than a thresholdvalue VT is applied to it. This threshold value VT is expressed in apositive direction with reference to Vw(1). If the cross point B2between the breakdown characteristic curve 51 b of the Zener diode ZDand the load line 56 of “0” data state of the programmable resistance ispositioned between the origin and Vw(1)+VT, “1” write may be enteredinto the programmable resistance. Voltages V_(LL), V_(HH) and the likeare selected in such a condition that sufficiently high voltage isapplied to the programmable resistance.

If the resistance value of “1” data written programmable resistance istoo low, a large current will flow through the Zener diode ZD, therebycausing thermal breakdown. Therefore, it is required to give attentionto the current value. Corresponding to some cases, it will be necessaryto include a current limiter.

If the third quadrant is used for “0” writing, there is not any dangerof thermal breakdown, because the load line variation due to writing isin such a direction that the current value decreases. In this case,however, since it is required to use the first quadrant for “1” writing,the possibility of erroneous writing in a read operation is certain.

In FIG. 5, voltage variations C1 to C3, which are applied tonon-selected cells during selective writing operation for the cell arrayshown in FIGS. 2 and 3, are shown. C1 is a voltage variation ofnon-selected cells along the selected bit line and selected word lineduring “0” data writing shown in FIG. 2; C2 is a voltage variation ofnon-selected cells along the selected bit line and selected word lineduring “1” data writing shown in FIG. 3; and C3 is a voltage variationof non-selected cells along the selected bit line and selected word linein such cases that during a “1” writing operation for a cell as shown inFIG. 3, “0” writing is performed for another cell as shown in FIG. 2.Such cases are not used in the above-described write operation. It isrequired that these voltage variations C1 to C3 are insufficient tobreak data the non-selected cells. Therefore, it is necessary forselecting the values of V_(H), V_(HH), V_(L) and V_(LL) in such acondition that the voltage variations do not cause the Zener diodes ofthe non-selected cells to be forward-biased to turn on, or do not causethose breakdown in the backward-bias direction.

FIG. 6 shows a characteristic of read operation which is performed inthe first quadrant, with the “0” write characteristic (shown by brokenlines). Since it is necessary to perform a read operation with a lowvoltage necessary for preventing the cells from erroneous write, theread operation in accordance with this embodiment is performed in thefirst quadrant similarly to “0” write. For example, in a read mode, thehigh level voltage V_(H) is applied to a selected word line, and a lowlevel voltage V_(L)r, which is higher than V_(L), is applied to aselected bit line. At this time, detection of a current difference or avoltage difference between crossing points S0 and S1 of theforward-biased characteristic curve 50 of the Zener diode and the loadlines 58, 57 of “0”, “1” data by a sense amplifier, and read data may bedetermined.

In the above-described read operation, it is required to prevent thecell from erroneous write due to the read voltage application. As shownin FIG. 6, as long as the voltage applied to the programmable resistanceis set at lower than the threshold value VT in the “1” data readoperation, no erroneous writes occur. In FIG. 6, in the “0” data readoperation, a voltage slightly higher than the threshold value VT isapplied to the programmable resistance. However, this becomes a “0”write mode. That is, a “0” read operation becomes a “0” rewriteoperation, thereby not being an erroneous write.

As previously described, it is possible to use the first quadrant for“1” data writing in principle. However, in such the case, a “0” readoperation becomes a weak “1” write mode. To avoid such the mode, it ispreferable to use the first quadrant for “0” write operations.

As described above, in the read scheme of FIG. 6, as long as that thecrossing point S1 for “1” data reading is in the voltage range betweenVr and Vr-VT, no erroneous writes occur. In other words, it is possibleto set the read voltage Vr without considering the crossing point S0 for“0” data reading. Therefore, a sense margin and a sense speed may beimproved. Supposing that the third quadrant is used for data readoperation, since Zener voltage Vz is approximately constant, it isdifficult to obtain a sense margin necessary for preventing theerroneous write.

As above-explained, in this embodiment, a Zener diode serves as anaccess element for applying voltages to the programmable resistance inopposite polarities, and the forward bias characteristic and thebackward bias breakdown characteristic thereof are be used. In thebackward bias characteristic, there is a voltage region, in which aresistance value is regarded as being approximately infinite, underZener voltage Vz. This is an important characteristic required for theaccess element of the programmable resistance. In general, it isrequired of the access element to have such a resistance value in anoff-state in a certain voltage range that is ten times or more as highas that in a select state. In consideration of this, it should beappreciated that other access elements, for example, a PN junctiondiode, a Schottky diode and the like, may be used as long as that theyare held in a high-resistive off-state in a certain voltage range. Inaddition, it should be appreciated that the programmable resistanceelement may be formed of not only above-described materials but alsosuch a material which carries current in different directionscorresponding to the polarity of voltage application to have differentresistance values corresponding to the current directions.

So far, the configuration of the basic cell array and the principle ofthe data read/write operation have been explained. In this embodiment, athree-dimensional cell array structure in which a plurality of cellarrays are stacked above a semiconductor substrate is utilized. Such athree dimensional cell array will be explained below.

FIGS. 7 and 8 show a layout and a cross section along I-I′ line thereofof a three-dimensional (3D) cell array including four-layer stacked cellarrays MA0 to MA3. In these figures, the same reference numerals areused as the same parts or components in the respective cell arrays,which numerals are distinguished between the cell arrays by addition ofsuffixes “a”, “b”, “c” and “d” thereto, and also distinguished betweenthe shared portions of each two cell arrays by addition of suffixes“ab”, “bc” and “cd”.

A silicon substrate 10 is covered with an insulator film such as asilicon dioxide film. Above the substrate, a plurality of bit lines (BL)12 a are arranged in parallel with each other. Pillar-type memory cellsMC are arranged on each bit line 12 a at a certain pitch, each of whichhas a programmable resistance element VR and a Zener diode ZD stackedthereon. Word lines (WL) 18 ab are formed to commonly connect the upperends of the memory cells MC in a direction perpendicular to the bitlines 12 a, whereby first cell array MA0 is formed.

As above-described, the programmable resistance element VR is writteninto a “0” state by applying a high level voltage to the word line WLand a low level voltage to the bit line BL to cause it to beforward-biased. Therefore, the programmable resistance element VR isdisposed with such a polarity that cathode and anode thereof are to beconnected to the word line WL and bit line BL, respectively. This is thesame for every cell array stacked.

In detail, the memory cells MC are formed by patterning laminated layershaving programmable resistance element layer 13 a, an ohmic electrode 14a, an n⁺-type silicon layer 15 a and a p+-type silicon layer 16 a. Theprogrammable resistance element layer 13 a is, as shown in FIG. 1,formed of an ion conductor containing a specified metal or a polymersandwiched by anode and cathode electrodes. An interlayer dielectricfilm 17 is buried around the memory cells MC to planarize the cell arrayMA0.

Second cell array MA1 is formed to share the word lines (WL0) 18 ab withthe first cell array MA0. In detail, pillar-type memory cells MC arearranged on each word line 18 ab at a certain pitch, each of which isformed by patterning the laminated films of a p⁺-type silicon film 16 b,an n⁺-type silicon film 15 b, an ohmic electrode 14 b and a programmableresistance element film 13 b to have a stacked structure of a Zenerdiode ZD and a programmable resistance element VR. The cell layout isthe same as that of the first cell array MA0. Bit lines (BL1) 12 ab arepatterned to commonly connect the programmable resistance element layers13 b arranged along a direction perpendicular to the word lines 18 ab.An interlayer dielectric film 19 is buried around the memory cells MC toplanarize the cell array MA1.

The stacked structure of third and fourth cell arrays MA2 and MA3 isperiodically formed as similar to the first and second cell arrays MA0and MA1. Bit lines (BL1) 12 bc are shared with the second cell array MA1and the third cell array MA2. The third cell array MA2 and the fourthcell array MA3 share the word lines (WL1) 18 cd with each other. Bitlines (BL0) 12 a of the lowest cell array MA0 and bit lines (BL3) 12 dof the uppermost cell array MA3 are independently prepared,respectively. Although the cross section along II-II′ line of FIG. 7 isnot shown, the memory cells MC are disposed on the continuously formedword lines WL at the same pitch as the bit lines on this cross section.

As shown in FIG. 7, the bit lines BL and word lines WL of each cellarray are formed with such a pattern that they are rotated by 90° toeach other, and memory cells MC are sandwiched therebetween at therespective crossing points. For example, the word lines WL and bit linesBL are formed with a line/space=1F/1F, where F is the minimum devicefeature size, thereby achieving the unit cell area of 4F². In order toform such the structure, it is possible to use in the patterning processof the memory cells MC two exposures with an exposure mask used forpatterning the word lines or the bit lines. In detail, in thelithography process for the laminated layers used for memory cells,exposures are performed twice with an exposure mask in such a mannerthat the mask is rotated by 90° between the respective exposure steps.Then, the laminated layers are etched so as to retain overlap portionsat the two exposure steps, and the memory cells MC are disposed at therespective crossing portions of the bit lines BL and the word lines WL.

In FIG. 8, the programmable resistance element layers 13 are disposedonly at the cross portions of the bit lines BL and the word lines WL. Incontrast to this, in such a case that the leak current of theprogrammable resistance element layer 13 is negligibly small, theprogrammable resistance element layer 13 may be retained withoutpatterning, as shown in FIG. 9. In this case, the sandwiched portionsbetween the diode ZD and the bit lines or the word lines within theprogrammable resistance element layer 13 materially function as theprogrammable resistance elements VR.

FIG. 10 shows a three-dimensional equivalent circuit of the 3D cellarray formed as above-described. In order to prevent the bit lines frommutual interference, each two bit lines constitute a pair, and anotherbit line is disposed between the pair of bit lines. BL00, /BL00, . . .BL01, /BL01, . . . are bit line pairs of the first cell array MA0; BL10,/BL10, BL11, /BL11, are shared bit line pairs between the second andthird cell array MA1 and MA2; and BL20, /BL20, BL21, /BL21, . . . arebit line pairs of the fourth cell array MA3. Further, WL0 (WL00, WL01, .. . ) are shared word lines between the first and second cell arrays MA0and MA1; and WL1 (WL10, WL11, . . . ) are shared word lines between thethird and fourth cell arrays MA2 and MA3.

In the above-described 3D cell array in which many memory cells areintegrated, variation of cell characteristics causes trouble. In detail,since the resistance value of the programmable resistance element VR isdetermined by dendrite growth and retraction thereof, variation occursdue to a history thereof, environment and the like. FIG. 11schematically shows a distribution of the resistance values of data “0”,“1”. If there is no overlap region, as shown in FIG. 11, between theresistance values of “0” and “1”, it is possible to distinguish between“0” and “1” by use of a reference resistance Rref. However, in the 3Dcell array that has numerous cells, it becomes difficult to set such areference resistance Rref. FIG. 12 schematically shows such a situationas above-described. Groups A, B, C and D include nearly disposed pluralcells, respectively. By giving attention to each the group, and it ispossible to set a reference resistance Rref. However, with respect tothe entire cell array, it becomes difficult or impossible.

In consideration of the above-described view points, in this embodiment,two nearby cells constitute a cell pair for storing complementary datatherein in such a manner that data “0” is stored in one cell and data“1” is stored in the other cell. Read operation is done by detecting thedifference between cell currents of the two cells constituting the pair.By use of this scheme, even if there is a partial overlap between thehigh resistive state distribution and the low resistive distribution inthe entire 3D cell array, it is possible to precisely read/write thecell data.

In FIG. 10, two cell pairs are typically shown as follows: two cellsconnected to a pair of bit lines BL00 and /BL00, respectively, withsharing a word line WL00 in the cell array MA0, being constitute onecell pair, one of which is a true cell, T-cell0, and the other is acomplementary cell, C-cell0; and two cells connected to a pair of bitlines BL10 and /BL10, respectively, sharing a word line WL10 in the cellarray MA1, being constituted to another pair cell, one of which is atrue cell, T-cell1, and the other is a complementary cell, C-cell1. Inevery pair of cells, a positive logic value of a binary data is storedin the true cell, and a negative logic value is stored in thecomplementary cell. Similar cell pairs are selected in the cell arraysMA2 and MA3. In FIG. 10, cell currents at the respective read selectiontimes are shown by arrows.

Data read/write methods in such the case that two memory cellsconstitute a cell pair will be described in detail below. FIG. 13 showstwo cell pairs in two cell arrays disposed adjacent up and down to havea shared word line WL. Data read operations for these two cell pairs maybe simultaneously performed by use of operation waveforms as shown inFIG. 14. In a non-select mode, V_(H)−V_(L) between the bit lines and theword lines is a hold voltage which holds the memory cells in such anon-select state that diodes thereof are backward-biased to be in a highresistive off-state.

In a read selection mode as shown in FIG. 14, a high level voltage V_(H)is applied to the word line WL which is held at a low level voltageV_(L) at a non-select time. At the same time, a low level voltage V_(L)r(>V_(L)) is applied to the bit lines BL0, /BL0, BL1 and /BL1 which areheld at high level voltage V_(H) at the non-select time. In other words,between the selected word line WL and the selected bit line pairs BL0,/BL0 and BL1, /BL1, a read voltage Vr=V_(H)−V_(L)r is applied toforward-bias the selected cells. As a result, cell currents flow in therespective cells as above-explained with FIG. 6. Detection of the cellcurrent differences between the pair of bit lines BL0, /BL0, and betweenthe pair of bit lines BL1, /BL1 is by sense amps, and cell data of therespective cell pairs may be determined. Since each cell pair isconstituted by two neighbouring cells to store complementary data, it ispossible to precisely sense the cell data.

Next, data write operations into cell pairs will be described. Althougha pair of cells store a data “0” in one cell and a data “1” in the othercell, “0” and “1” write voltages applied between the word line and thebit line have to be opposite each other as above-described. This meansthat it is impossible to simultaneously write data into the true cell,T-cell, and the complementary cell, C-cell, which share a word line.Therefore, it is required to perform data write operations for a cellpair twice.

FIG. 15 shows waveforms of “0” data writing (i.e., T-cell=“0”,C-cell=“1”) and “1” data writing (i.e., T-cell=“1”, C-cell=“0”) into acell pair. In order to write “0” data, with respect to the bit lineswhich are held at the high level voltage V_(H) in the non-select mode, alow level pulse voltage V_(L) is applied to one bit line pair, BL0 (orBL1), and a high level pulse voltage V_(HH) higher than V_(H) is appliedto the other, /BL0 (or /BL1). A high level voltage V_(H) is applied tothe word line WL in the former half T1 of the above-described bit lineselection period, and a low level voltage V_(LL) lower than V_(L) isapplied to the same in the latter half T2.

As a result, in the former half T1, “0” write voltage,Vw(0)=V_(H)−V_(L), is applied to one cell, T-cell, of the pair cell toforward-bias the diode thereof due to the high level voltage V_(H) ofthe word line WL and the low level voltage V_(L) of the bit line BL0 (orBL1), whereby the T-cell is written into a “0” data state. At this time,since the voltage applied to the other cell, C-cell, is V_(H)−V_(HH),the diode of C-cell is held at an off-state. Therefore, no error dataare written into the C-cell. In the latter half T2, “1” write voltage,Vw(1)=V_(LL)−V_(HH), is applied to the other cell, C-cell, of the paircell to cause the diode thereof to breakdown due to the low levelvoltage V_(LL) of the word line WL and the high level voltage V_(HH) ofthe bit line /BL0 (or /BL1), whereby the C-cell is written into a “1”data state. At this time, the voltage applied to the cell T-cell, inwhich a data has been written, is V_(LL)−V_(L). Since the diode of theT-cell is held at an off-state in this condition, no error data arewritten into the T-cell.

In order to write “1” data, one of the bit line pair, BL0 (or BL1), isboosted to the higher level voltage V_(HH) from the high level voltageV_(H), and the other, /BL0 (or /BL1), is pulled down to the low levelvoltage V_(L) from the high level voltage V_(H). And, similarly to the“0” write mode, the high level voltage V_(H) is applied to the word lineWL in the former half T1 of the above-described bit line selectionperiod, and then the low level voltage V_(LL) is applied to the same inthe latter half T2.

As a result, in the former half T1, one of the cell pair, C-cell, iswritten into a “0” data state because the cell diode is forward-biaseddue to the high level voltage V_(H) of the word line WL and the lowlevel voltage V_(L) of the bit line /BL0 (or /BL1). In the latter halfT2, the other cell, T-cell, is written into a “1” data state because thelow level voltage V_(LL) of the word line WL and the high level voltageV_(HH) of the bit line BL0 (or BL1) cause the cell diode to breakdown.No erroneous writes occur in both the former half for “0” writing andthe latter half for “1” writing, similarly to the above-described “0”writing mode.

As apparent from FIG. 15, “0”, “1” writing into a cell pair may beselected by reversing the voltages applied to the bit line pair, whilethe same voltage is applied to the word line. Therefore, it is possibleto perform simultaneous data writing into two pairs of cells with ashared word line.

FIG. 16 shows in detail waveforms of simultaneous data writing into twocell pairs, (T-cell 0, C-cell 0) and (T-cell1, C-cell1), which areadjacent up and down with a shared word line WL00. The data combinationsof the two pair cells are expresses as four values “00”, “01”, “10” and“11”. Corresponding to the four values data, in FIG. 16, bit data ofT-cell1, C-cell1, T-cell0 and C-cell0 are shown at upsides of therespective waveforms. To the respective bit line pairs, (BL00, /BL00),(BL10, /BL10), the high level voltage V_(HH) and the low level voltageV_(L) are applied in correspondence with to-be-written data. Thevoltages applied to the word line WL00 are changed all the same for thefour data such that the high level voltage V_(H) and the low levelvoltage V_(L) are applied in the former half and the latter halfrespectively in the bit line selection period, similarly to that in FIG.15. By use of such waveforms, two cell pairs may be simultaneouslywritten.

As is apparent from the above-described write operations, it should beappreciated that it is possible to simultaneously access the respectiveplural cell pairs within the first and second cell arrays MA0 and MA1with shared word lines. Similarly, it is possible to simultaneouslyaccess the respective plural cell pairs within the third and fourth cellarrays MA2 and MA3 with shared word lines. In contrast to this, notethat it is not possible to simultaneously access the second and thirdcell arrays MA1 and MA2 with shared bit lines.

Up to this point, it has been explained that such a cell pairconfiguration laterally neighbouring two memory cells constitute a cellpair in each cell array layer in the three-dimensional cell array.However, the cell pair configuration method is not so limited. As shownin FIG. 17, it is possible to select a vertically neighbouring pair ofmemory cells MC with a shared word line WL so as to constitute a cellpair (i.e., a true cell, T-cell, and a complementary cell, C-cell). Inthis case, the bit lines BL0, BL1 which belong to different cell arraysbecome a pair of bit lines to be connected to the pair cell.

FIG. 18 is a schematic perspective view showing a stacking state of cellblocks 100 and a read/write circuit 200 and interconnectionrelationships therebetween. Each cell block 100 corresponds to theabove-described 3D cell array with four layers. A 3D cell array is, whennecessary, divided into a plurality of cell blocks 100 with apredetermined capacity. In FIG. 18, two cell blocks 100 are arranged ina direction along the bit lines.

As shown in FIG. 18, the read/write circuit 200, which is used for datareading and writing in communication with the cell block 100, underliesthe cell block 100. The read/write circuit 200 is formed such that themain portion thereof is disposed within a rectangular cell layout region210 defined on the substrate 10, above which the cell block 100 isstacked. The cell layout region 210 is defined by two boundaries A1 andA2 in the direction of the bit lines, and by two boundaries B1 and B2 inthe direction of the word lines.

A group of bit lines BL0 of the first cell array MA0 and a group of bitlines BL2 of the fourth cell array MA3 are drawn to the first boundaryA1 side to be connected to a bit line select circuit 201, which isdisposed along the boundary A1 in the read/write circuit 200, throughvertical wirings (i.e., passages that vertically run to the substrate)101 that are disposed along the boundary A1. A group of bit lines BL1shared by the second and third cell arrays MA1 and MA2 are drawn to thesecond boundary A2 side to be connected to another bit line selectcircuit 202, which is disposed along the boundary A2 in the read/writecircuit 200, through vertical wirings 102 that are disposed along thesecond boundary A2.

The reason why the bit lines BL0 and BL2 are drawn to the same side tobe commonly connected to the bit line select circuit 201 through thevertical wirings 101 is such a fact that these groups of bit lines arenot simultaneously activated. In detail, cell arrays MA0 and MA1 aresimultaneously activated because these have shared word lines WL0.Similarly to this, cell arrays MA2 and MA3 are simultaneously activatedbecause these have shared the word lines WL1. However, since the cellarrays MA1 and MA2 share the bit lines BL1, the lower cell arrays (MA0,MA1) and the upper cell arrays (MA2, MA3) are not activatedsimultaneously. The bit line select circuits 201, 202 include bit linedecoders/multiplexers (BL-DEC/MUX).

The word lines WL0 and WL1 are drawn to the third boundary B1 side to beconnected to word line select circuit 208, which is disposed along theboundary B1 in the read/write circuit 200, through vertical wirings 103and 104, respectively, that are disposed along the boundary B1. The wordline select circuit 208 has word line decoders/multiplexers(WL-DEC/MUX).

A central portion of the read/write circuit 200 serves as a global busregion 207, in which I/O data lines and pulse signal lines are disposedcrossing this region in the direction of the word lines. Between thisglobal bus region 207 and the bit line select circuits 201 and 202, aredisposed sense amplifier arrays 203 and 204, respectively. Signal linesformed at the global bus region 207 are shared by the sense amplifierarrays 203 and 204. The sense amplifiers in the sense amplifier arrays203 and 204 are connected to bit line select circuits 201 and 202through signal lines disposed at local bus regions 205 and 206,respectively. Therefore, some selected from the bit lines BL0 or BL2 bythe bit line select circuit 201 are connected to the sense amp array203. Similarly, some selected from the bit lines BL1 by the bit lineselect circuit 202 are connected to the sense amp array 204.

The I/O data lines and pulse signal lines disposed at the global busregion 207 are drawn to the fourth boundary B2 side of the cell layoutregion 210. Along this boundary B2, disposed is a write circuit (i.e.,write pulse generator circuit) 209 for applying write pulse signals toselected bit lines.

As above-described referring to FIG. 18, bit lines and word lines of thecell arrays are connected to the read/write circuit 200 formed on thesubstrate 10 through the vertical wirings 101 to 104. Practically, thesewirings 101 to 104 are formed of contact plugs buried in interlayerdielectric films formed surrounding the cell array. The structuralexamples of the interconnections are shown in FIGS. 19 and 20. FIG. 19shows a connection state between the bit lines and the read/writecircuit 200 on a cross-section along the bit lines of the cell array.FIG. 20 shows a connection state between the word lines and theread/write circuit 200 on a cross-section along the word lines of thecell array.

As shown in FIGS. 19 and 20, the read/write circuit 200 has necessarytransistors and metal interconnections formed on an interlayerdielectric film 11 a covering the transistors. The read/write circuit200 is covered by an interlayer dielectric film 11 b, and the fourlayered cell arrays are formed thereon. Therefore, the interlayerdielectric films 11 a and 11 b constitute the insulator film 11 shown inFIGS. 8 and 9.

As shown in FIG. 19, the vertical wirings 101, which are used to connectthe bit lines BL0, BL2 drawn toward the boundary A1 of the cell layoutregion 210 to the bit line select circuit 201, are composed of contactplugs 101 a to 101 e buried in the interlayer dielectric films 17, 19,20 and 21. Similarly, the vertical wirings 102, which are used toconnect the bit lines BL1 drawn toward the boundary A2 of the celllayout region to the bit line select circuit 202, are composed ofcontact plugs 102 a to 102 c buried in the interlayer dielectric films11, 17 and 19.

As shown in FIG. 20, the vertical wirings 103, which are used to connectthe word lines WL0 drawn toward the boundary B1 of the cell layoutregion to the word line select circuit 208, are composed of contactplugs 103 a and 103 b buried in the interlayer dielectric films 11 and17. The vertical wirings 104, which are used to connect the word linesWL1 drawn toward the same side as the word lines WL0 to the word lineselect circuit 208, are composed of contact plugs 104 a to 104 d buriedin the interlayer dielectric films 11, 17 and 20.

Although the lowest contact plugs 101 a, 102 a, 103 a and 104 a of thelaminated cell arrays in FIGS. 19 and 20 are connected to metal wiringsof the read/write circuit 200, it is possible to directly connect theseto source/drain diffusion layers of the transistors. FIGS. 19 and 20show an example in which the contact plugs are formed of metal filmsused for bit lines and word lines. The fabrication steps will bedescribed later. Additionally, it is appreciated that the contact plugsmay be formed of other metal films different from the bit lines and wordlines or polycrystalline silicon films.

One cell block 100 shown in FIG. 18 includes, for example, 512 bit lines(BL) and 128 word lines (WL) for one cell array. As described above, twomemory cells store one bit data in this embodiment. In this case, onecell block has a memory space of 256 columns (Col)×128 rows(Row). Thememory capacity can be increased by increasing the number of cell blocksto be arranged. In order to achieve a high-speed access in such a largecapacitive memory, it is necessary to perform parallel access formulti-bit data. For example, in order to perform 32-bits parallelaccess, one cell block is to be divided into two parts in the word linedirection, and into 32 parts in the bit line direction, whereby 64 cellunits are obtained. As a result, each cell unit has a capacity of32IO×4Col×4 Row×4. On the global bus region 207, data lines and pulsesignal lines are disposed for 64IO data input/output.

FIG. 21 shows a schematic layout of the read/write circuit 200 withrespect to one cell block 100 shown in FIG. 18 in a case that theabove-described cell block construction is used. On the word line selectcircuit (WL-DEC/MUX) 208 as been disposed at the right side in FIG. 21,disposed are row address (RA) signal lines 301, which vertically run forselecting one each (i.e., upper and lower ones) from 128×2 word lines inthe cell block 100. The write circuit 209 disposed at the left side inFIG. 21 outputs pulse signals with high level voltage V_(HH) and lowlevel voltage V_(L) that are supplied to selected bit lines in a writemode (see FIG. 15). Write pulse signal lines (WP) 305 which transfer thewrite pulse signals are disposed so as to laterally run on the globalbus region 207. In parallel with the write pulse signal lines 305 on theglobal bus region 207, main data lines 304 are disposed, on which readout data are transferred.

One cell unit is selected in one cell block, and cell data of lower twocell arrays or upper two cell arrays in each cell unit aresimultaneously activated. Therefore, data lines 304 are prepared for32IO×2=64IO. The write pulse signal lines are the same. In detail, in aread mode, read data on plural bit lines, which are respectivelyselected from the lower two cell arrays (MA0, MA1) or the upper two cellarrays (MA2, MA3) by the bit line select circuits 201 and 202, aresimultaneously sensed by the sense amp arrays 203 and 204, and thensimultaneously transferred to the data lines 304. In a write mode, writepulse signals, which are to be supplied to plural bit lines respectivelyselected from the lower two cell arrays (MA0, MA1) or the upper two cellarrays (MA2, MA3), are output to the write pulse signal lines 304 fromthe write circuit 209, and then transferred to the plural bit linesrespectively selected by the bit line select circuits 201 and 202.

On the lower and upper ends of the read/write circuit 200, are disposedthe bit line select circuits 201 and 202, respectively. Column address(CA) signal lines 302 and 303 are disposed to laterally run on therespective regions. One of the bit line select circuits, i.e., circuit201, selects 32 bit line pairs from 512 bit line pairs (=64IO×4Col) inthe upper two cell arrays, and the other selects 32 bit line pairs from512 bit line pairs in the lower two cell arrays. Therefore, on therespective local bus regions 205 and 206, are disposed four pairs ofcurrent pass lines BP, /BP for common 4-columns (=8 bit lines) data soas to cross the regions of sense amplifier arrays 203 and 204 forapplying the pulse signals of the pulse signal lines 305 to bit linesselected by the respective bit line select circuits 201 and 202.Additionally, 64 pairs of local data lines DL, /DL for 4 data columnsare disposed on the respective local bus regions 205 and 207, and theseare connected to the respective sense amps in the sense amplifier arrays203 and 204.

One circuit portion 310, that is to be connected to 4 Row×2 (=8 wordlines) and another circuit portion 312, that is to be connected to 4Col(=8 bit lines), each being surrounded by a broken line in FIG. 21,are shown in FIGS. 22 and 23, respectively, in detail.

Two multiplexers MUX0 and MUX1 have select gate circuits for selectingthe lower word lines WL0 shared by the cell arrays MA0 and MA1, and theupper word lines WL1 shared by the cell arrays MA2 and MA3,respectively. Eight word lines input to the multiplexer MUX0 in FIG. 22correspond to the word lines WL0 of the lower two cell arrays in FIG.18. Decoders DEC include decode gates G (G1, G2, . . . ) for selectingone of 32 cell units. The multiplexer MUX0 has a select gate circuit 401composed of NMOS transistors QN (QN21 to QN24, QN25 to QN28, . . . )that are driven by select signals S10 to S13 so as to select one fromfour word lines. These NMOS transistors QN21 to QN24 and QN25 to QN28are commonly connected to nodes N11 and N12, respectively. To thesenodes N11 and N12, is applied a word line drive signal Vwdrv output froma word line driver circuit 403 through self-boost transistors QN81 andQN82 which are selectively driven by the decode gates G1 and G2. Theword line drive signals Vwdrv are held at the high level voltage V_(H)in the read mode (see FIG. 14), or at the high level voltage V_(H) inthe former half and the low level voltage V_(LL) in the latter half inthe write mode (see FIG. 15). The gates of transistors QN81, QN82 areconnected to the output nodes of the decode gates G1, G2 though NMOStransistors QN83, QN84 so as to be selectively charged at a high levelby the outputs of the decode gates G1, G2. The word line drive signalVwdrv is applied to a word line WL through on-state NMOS transistorsQN81, QN82. Since the NMOS transistors QN81, QN82 are configured astransfer gates which are to be self-boosted by capacitive couplingbetween gates and sources therebetween, the word line drive signalVwdrv, which are changed between V_(H) and V_(LL), is transferred to theword line WL without voltage drops.

The multiplexer MUX0 has a reset circuit 402 composed of NMOStransistors QN (QN11 to QN14, QN15 to QN18, . . . ) for holdingnon-selected word lines as being at low level voltage V_(L)=Vss. Themultiplexer MUX1 is composed as similar to the multiplexer MUX0.

A sense amp SA shown in FIG. 23 is one of 32 sense amps in the sense amparray 205 shown in FIG. 21. Four pairs of eight bit lines BL0, /BL0 toBL3, /BL3 connected to the sense amp SA are ones selected from the bitline group BL0 or BL2 shown in FIG. 10. As previously described, sincethe lower two cell arrays MA0 and MA1 and the upper two cell arrays MA2and MA3 are not activated at a time, the sense amplifier SA is commonlyused for the lower cell arrays MA0, MA1 and the upper cell arrays MA2,MA3.

The sense amplifier SA is a CMOS flip-flop type current sensingamplifier with an activating PMOS transistor QP30. Two nodes N1 and N2thereof are directly connected to a pair of lines GBi, /GBi in theglobal data lines 304, respectively. Drains of sensing NMOS transistorsQN61 and QN62 are selectively connected to data lines DL and /DL throughNMOS transistors QN31 and QN32, respectively, that are controlled by aread control signal R to turn-on during a read operation. Except on thedata read time, the nodes N1 and N2 are shorted with each other by anequalizing transistor QN73. Data lines DL, /DL are connected to a pairof bit lines selected by the bit line decoder/multiplexer BL-DEC/MUX.

Drains of the sensing transistors QN61, QN62 may be selectively set atVss or at floating states by NMOS transistors QN71, QN72 which arecontrolled by a clock CLK. Based on the operations of transistors QN71,QN72, it is possible to apply the low level voltage VLr(=Vss) shown inthe waveforms of FIG. 14 to selected bit lines and to perform a positivefeed-back operation of the sense amp SA when cell data are transferredto NMOS transistors QN61, QN62 in a data sense time.

The bit line decoder/multiplexer BL-DEC/MUX has a select gate 403composed of NMOS transistors QN51 to QN54, and Q55 to Q58 controlled bydecoded signals S20 to S23 for selecting one pair from four pairs of bitlines to connect these to the data lines DL and /DL, respectively.Additionally, the bit line decoder/multiplexer BL-DEC/MUX has a resetcircuit 404 composed of PMOS transistors QP51 to QP54, and QP55 to QP58for holding non-selected bit lines as being at a high level of Vdd.

The pair of data lines DL, /DL are connected to a pair of signal linesWPi, /WPi in the pulse signal lines 305 through NMOS transistors QN41,QN42 that are driven by a write control signal W to turn-on, and throughsignal lines BP, /BP.

In the above-described configuration, when a data read operation isperformed, word lines selected by select gate circuit 403 become “H”,and bit line pairs selected by select gate circuit 403 become “L”. Atthis time, cell currents from the selected complementary cells on theselected bit line pair are transferred to the drains of NMOS transistorsQN61, QN62 of the sense amp SA through data lines DL, /DL and throughNMOS transistors QN31, QN32. During this operation, NMOS transistorsQN71, QN72 are held at an off-state. Thereafter, clock CLK becomes “H”to turn-on the NMOS transistors QN71, QN72, whereby the drains of thesensing NMOS transistors QN61, QN62 are clamped at Vss. As a result, adifferential voltage generated between the nodes N1 and N2 due to thedifference of cell currents is positively fed back to be amplified suchthat one of the nodes N1, N2 becomes Vdd, while the other becomes Vss.Amplified cell data as above-described is output to the main data linesGBi, /GBi.

In a data write mode, the drive signal Vwdrv, which is at the high levelvoltage V_(H) in the former half and at the low level voltage VL in thelatter half, is applied to a selected word line. Simultaneously, writepulse signals, which are set at combinations among V_(HH), V_(H), V_(L)and V_(LL) corresponding to-be-written data, are applied to selectedcell pairs through the write pulse signal lines WPi, /WPi, whereby datawrite operations are performed.

Since one word line is commonly connected to many cell pairs, it isrequired for the word line to supply a large current to the cell pairs.In consideration of such a current value, it is required to designdrivability of the word line decoder, resistance of the word lineitself, the transistor size, and the like. It should be appreciated thatthe word line multiplexer MUX0 for eight word lines shown in FIG. 22 andthe bit line decoder/multiplexer DEC/MUX for eight bit lines shown inFIG. 23 have the same circuit configuration. Therefore, these circuitregions may have the same layout as shown in FIG. 24. In FIG. 24,transistors QN21 to QN28, QN11 to QN18, select signals S10 to S13, /S10to /S13 and low level power supply (Vss) lines in the circuit of FIG. 22are shown, and in correspondence to these, transistors QN51 to QN58,QP51 to QP58, select signals S20 to S23 and high level power supply(Vdd) lines in the circuit of FIG. 12 are shown parenthesized. Althoughthere is such a situation that the respective transistors correspondingto each other are of different conductivity-types, it is possible to usethe same layout for these circuits.

Vertically running wirings 410 in FIG. 24 are gate lines of transistorsthat serve as select lines and power supply lines of Vdd, Vss. These maybe simultaneously formed by patterning a polysilicon film. Since powersupply lines Vss, Vdd are merely required to be potentially fixed asnecessary for holding non-selected bit lines and word lines as being notfloating, it is not required that these are not very low resistive.Therefore, it is able to use for these lines the same polysilicon filmused for gate electrodes. Although laterally running wirings 411 areshown by schematic straight lines, these are metal wirings which areconnected to sources and drains of transistors. Contact portions 412serve as to connect the metal wirings 411 to bit lines and word lines,to which the vertical interconnection lines (i.e., contact plugs) 101 to104 shown in FIG. 18 are connected.

Bit lines and word lines in the above-described cell array arepreferably formed with a line/space of 1F/1F (F: minimum device-featuresize). These bit lines and word lines are connected while holding theline pitch to the read/write circuit 200 on the substrate as shown inFIG. 18. In this case, the metal wirings 411 shown in FIG. 24 are formedto have the same line/space of 1F/1F. In contrast to this, transistorsdisposed on the way of the metal wirings 411 must have a large areanecessary for supplying a required current. In consideration to thisview point, in FIG. 13, each transistor is formed to have a gate widthof three pitches of the metal wirings 411.

When the transistor size and metal wire pitch are determined asabove-described, in order to effectively dispose the transistors, theselect signal lines (S10, /S10)(S20), (S11, /S11)(S21), (S12, /S12)(S22)and (S13, /S13)(S23) which are suffixed in accordance with an addressorder of 0, 1, 2 and 3 are arranged in such an order of (S10,/S10)(S20), (S12, /S12)(S22), (S11, /S11)(S21) and (S13, /S13)(S23). Asa result, between a transistor array of QN21 (QN51), QN23(QN53) selectedby the select signal line S10(S20) and a transistor array of QN23(QN52),QN24(QN54) selected by the select signal line S11(S21), disposed is atransistor array of QN25(QN55), QN27(QN57) selected by the select signalline S12(S22). By employing such the transistor arrangement, it ispossible to dispose transistors with a large size within a metal wiringarea in which wirings are arranged at a small pitch without idle spaces.

Next, referring to FIGS. 25 to 27, it will be explained that the bitlines, word lines and contact portions thereof to the read/write circuit200 are simultaneously formed by use of a dual damascene method. FIG. 25shows such a state that bit lines BL0 are formed on the interlayerdielectric film 11 covering the substrate 10 on which the read/writecircuit 200 has been formed. Simultaneous with the formation of thesebit lines BL0, are formed contact plugs 103 a, 104 a by a dual damasceneprocess. These are used for connecting the word lines WL0, WL1 to bestacked thereon to the read/write circuit 200. Although not shown inFIG. 25, other contact plugs for connecting end portions of the bitlines BL0 to the read/write circuit 200 are formed simultaneously withthe contact plugs 103 a, 104 a.

Then, as shown in FIG. 26, memory cells, each of which is constituted bya programmable resistance element and a diode stacked with each other,are formed on the bit lines BL0 at a predetermined pitch. Next, as shownin FIG. 27, interlayer dielectric film 17 is deposited to cover thememory cells MC, and then word lines WL0 are formed on the film 17 by adual damascene process. In this process, contact plugs 103 b and 104 b,which are to be connected to the contact plugs 103 a and word lines WL1to be formed next, respectively, are buried.

FIGS. 28A to 28C show the burying process of the word lines WL0 andcontact plugs 103 b, 104 b in detail in a cross sectional view along theword line WL0 direction. FIG. 28A shows such a state that the interlayerdielectric film 17 is deposited to cover the memory cells MC and thenplanarized. Thereafter, as shown in FIG. 28B, wiring-burying trenches501 are formed in the interlayer dielectric film 17 by an RIE (ReactiveIon Etching) process for word line burying so as to expose the upperends of the memory cells MC. Further, contact holes 502 are formed atthe positions where the contact plugs 103 a, 104 a have been buried soas to be deeper than the trenches 501. Then, a wiring material metallayer is deposited and processed by a CMP (Chemical MechanicalPolishing) method. As a result, as shown in FIG. 28C, the word lines WL0and the contact plugs 103 b, 104 b are simultaneously buried and formed.

Continuously, memory cell formations, interlayer dielectric filmdepositions, wiring and contact plug formations by use of the damascenemethod are periodically performed. By use of such processes, as shown inFIGS. 19 and 20, four-layered cell arrays may be stacked in such amanner that the bit lines and word lines of each layer are connected tothe read/write circuit on the substrate.

INDUSTRIAL APPLICABILITY

According to this invention, it is possible to provide a programmableresistance memory device in which a cell array and a read/write circuitare integrally formed in a small chip area.

1. A programmable resistance memory device comprising: a semiconductorsubstrate; at least one cell array, formed above said semiconductorsubstrate, which comprises a plurality of bit lines arranged in parallelwith each other, a plurality of word lines arranged in parallel witheach other in such a direction as crossing said bit lines, and memorycells connected between the bit lines and the word lines at crossportions of the bit lines and the word lines, each said memory cellhaving a stack structure of a programmable resistance element and anaccess element, said programmable resistance element and an accesselement, said programmable resistance element being applied a voltagegreater than a certain threshold to develop a high resistance state or alow resistance state and storing the high resistance state or the lowresistance state in a non-volatile manner, said access element having aresistance value in an off-state that is ten times or more as high asthat in a select state; and a read/write circuit formed on saidsemiconductor substrate as underlying said cell array and connected tothe bit lines and word lines through vertical wirings for data readingand data writing in communication with said cell array.
 2. Theprogrammable resistance memory device according to claim 1, wherein saidprogrammable resistance element comprises an ion conductor containingmetal ions with anode and cathode electrodes sandwiching said ionconductor.
 3. The programmable resistance memory device according toclaim 1, wherein said programmable resistance element comprises apolymer, in which conductive particles are dispersed, with anode andcathode electrodes sandwiching said polymer.
 4. The programmableresistance memory device according to claim 1, wherein said accesselement is a diode selected from a Zener diode, a PN junction diode anda Schottky diode.
 5. The programmable resistance memory device accordingto claim 4, wherein said memory cells are arranged on the bit lines at acertain pitch in a direction of an extension of a bit line, and saideach word line is commonly connected with the upper ends of said memorycells in such a direction as crossing said bit lines.
 6. Theprogrammable resistance memory device according to claim 5, wherein saidprogrammable resistance element and said diode serving as said accesselement of each said memory cell are stacked in such a manner that therespective anodes of said programmable resistance element and said diodeare connected to said bit line and word line, respectively.
 7. Theprogrammable resistance memory device according to claim 6, wherein aplurality of cell arrays are stacked in such a manner that at least oneof said bit lines and word lines are shared with adjacent two cellarrays.
 8. The programmable resistance memory device according to claim7, further comprising: first and second vertical wirings disposedoutside of first and second boundaries that define a cell layout regionof said cell arrays in the direction of said bit lines to connect saidbit lines of the respective cell arrays to said read/write circuit; andthird vertical wirings disposed outside of one of third and fourthboundaries that define said cell layout region in the direction of saidword lines to connect said word lines of the respective cell arrays tosaid read/write circuit.
 9. The programmable resistance memory deviceaccording to claim 8, wherein said first to third wirings are formed ofcontact plugs which are buried in an insulator layer formed to surroundsaid cell arrays.
 10. The programmable resistance memory deviceaccording to claim 4, wherein said read/write circuit is configured toapply a first write voltage to a selected one of said memory cells tocause a diode thereof serving as said access element forward bias,thereby setting the programmable resistance element thereof at the lowresistance state, and to apply a second write voltage with a polarityopposite to said first write voltage to the selected one of said memorycell to cause a diode thereof serving as said access element breakdown,thereby setting the programmable resistance element thereof at the highresistance state.
 11. The programmable resistance memory deviceaccording to claim 10, wherein said read/write circuit is configured toapply a read voltage lower than said first write voltage to the selectedone of said memory cells to cause a diode thereof serving as said accesselement forward bias, thereby detecting a data sate of the programmableresistance element thereof.
 12. The programmable resistance memorydevice according to claim 6, wherein said read/write circuit isconfigured to apply a first write voltage to a selected one of saidmemory cells through a selected bit line and a selected word line tocause a diode thereof serving as said access element forward bias,thereby setting the programmable resistance element thereof at the lowresistance state, and to apply a second write voltage with a polarityopposite to said first write voltage to the selected one of said memorycells through a selected bit line and a selected word line as to cause adiode thereof serving as said access element breakdown, thereby settingthe programmable resistance element thereof at the high resistancestate.
 13. The programmable resistance memory device according to claim12, wherein said read/write circuit is configured to apply a readvoltage lower than said first write voltage to the selected one of saidmemory cells through a selected bit line and a selected word line tocause a diode thereof serving as said access element forward bias,thereby detecting a data sate of the programmable resistance elementthereof.
 14. The programmable resistance memory device according toclaim 13, wherein said read/write circuit is configured to apply a holdvoltage between said bit lines and word lines in a non-select state tohold said diodes of said memory cells at a high impedance off-state witha reverse bias.
 15. The programmable resistance memory device accordingto claim 7, wherein neighbouring two memory cells in each said pluralityof cell arrays constitute a pair cell for storing complementary data oneof which is the high resistance state, and the other is the lowresistance state, and wherein said complementary data of said pair cellare read out to a bit line pair as one bit of data.
 16. The programmableresistance memory device according to claim 15, wherein two memory cellsconstituting said pair cell are laterally neighbouring in each of saidplurality of cell arrays in such a manner that anodes of diodes thereofare commonly connected to one of said word lines and anodes ofprogrammable resistance elements thereof are connected to a pair of bitlines.
 17. The programmable resistance memory device according to claim16, wherein one bit line of said pair of bit lines to which saidcomplementary data are read out is disposed between bit lines of anotherpair of bit lines to which another complementary data are read out. 18.The programmable resistance memory device according to claim 15, whereintwo memory cells constituting said pair cell are vertically neighbouringbetween neighbouring two cell arrays in said plurality of cell arrays insuch a manner that anodes of diodes thereof are commonly connected toone of said word lines shared by said two cell arrays, and anodes ofprogrammable resistance elements thereof are connected to bit linesdisposed at said two cell arrays, respectively.
 19. The programmableresistance memory device according to claim 8, wherein said read/writecircuit comprises: a global bus region having a plurality of data linesto which read data are transferred and a plurality of write pulse signallines for transferring write pulse signals to said bit lines, said datalines and said write pulse signal lines being so disposed as to cross acentral portion of said cell layout region in the direction of said bitlines; first and second bit line select circuits disposed along saidfirst and second boundaries of said cell layout region, respectively, towhich the respective bit lines of neighboring two cell arrays areconnected; first and second sense amp arrays for sensing data of bitlines selected by said first and second bit line select circuits,respectively, said first and second sense amp arrays being disposedbetween said first, second bit line select circuits and said global busregion, respectively; a word line select circuit disposed along one ofsaid third and fourth boundaries of said cell layout region, to whichshared word lines of said neighboring two cell arrays are connected; anda write circuit disposed along the other of said third and fourthboundaries of said cell layout region for generating said write pulsesignals supplied to said write pulse signal lines.
 20. The programmableresistance memory device according to claim 19, wherein a plurality ofshared word lines selected by said word line select circuit aresimultaneously activated, and a plurality of the respective bit lines ofsaid neighboring two cell arrays selected by said first and second bitline select circuits are simultaneously selected, respectively, therebysimultaneously accessing the respective plural memory cells in saidneighboring two cell arrays.
 21. The programmable resistance memorydevice according to claim 20, wherein said first and second sense amparrays have sense amps for simultaneously sensing data of the respectiveplural memory cells which are simultaneously selected in saidneighboring two cell arrays, sensed data are simultaneously transferredto said data lines in said global bus region.
 22. The programmableresistance memory device according to claim 20, wherein said writecircuit is configured to simultaneously output write pulse signals,which are to be transferred to the plural bit lines simultaneously, tosaid write pulse signal lines in said global bus region.
 23. Theprogrammable resistance memory device according to claim 19, whereinneighbouring two memory cells in each said cell array constitute a paircell for storing complementary data, one of which is the high resistancestate and the other is the low resistance state, and wherein each ofsaid first and second sense amp arrays comprises differential typecurrent sensing amplifiers arranged therein, each of said currentsensing amplifiers being connected to a bit line pair to which said paircell is connected for sensing a current difference due to saidcomplementary data.
 24. A programmable resistance memory devicecomprising: a semiconductor substrate; at least one cell array, formedabove said semiconductor substrate, which comprises a plurality of bitlines arranged in parallel with each other, a plurality of word linesarranged in parallel with each other in such a direction as crossingsaid bit lines, and memory cells connected between the bit lines and theword lines at cross points of the bit lines and word lines, each saidmemory cell having a stack structure of a programmable resistanceelement and an access element, said programmable resistance elementstoring a high resistance state or a low resistance state in anon-volatile manner, said access element having a resistance value atapplying voltages V2 and V3 greater than resistance values at applyingvoltages V1 and V4 (where V4>V3>V2>V1); and a read/write circuit formedon said semiconductor substrate as underlying said cell array andconnected to the bit lines and word lines through vertical wirings fordata reading and data writing in communication with said cell array. 25.A programmable resistance memory device comprising: a semiconductorsubstrate; at least one cell array, formed above said semiconductorsubstrate, which comprises a plurality of bit lines arranged in parallelwith each other, a plurality of word lines arranged in parallel witheach other in a direction crossing said bit lines, and memory cellsconnected between the bit lines and the word lines at cross points ofthe bit lines and word lines, each said memory cell having a stackstructure of a programmable resistance element and an access element,said programmable resistance element is applied one of a positivevoltage and a negative voltage to change a resistance state from high tolow, is applied the other one of the positive voltage and the negativevoltage to change the resistance state from low to high and storing thehigh resistance state or the low resistance state in a non-volatilemanner, said access element having a resistance value in an off-statethat is ten times or more as high as that in a select state; and aread/write circuit formed on said semiconductor substrate as underlyingsaid cell array and connected to the bit lines and word lines throughvertical wirings for data reading and data writing in communication withsaid cell array.